Coupling of hierarchical fluid models with electrostatic and mechanical models for the dynamic analysis of MEMS

Sudipto K. De, N. R. Aluru

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Coupling of hierarchical fluid models with electrostatic and mechanical models for the dynamic analysis of MEMS'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds