Keyphrases
Electrostatic Model
100%
Micro-electro-mechanical Systems
100%
Fluid Model
100%
Dynamic Analysis
100%
Mechanical Model
100%
Fluidics
33%
Newton's Method
33%
Damping Effect
33%
Physical Domain
33%
Air Damping
33%
Microstructure
16%
Process Optimization
16%
Dynamical Behavior
16%
Numerical Results
16%
Design Process
16%
Viscous Fluid
16%
Device Operation
16%
Actuator
16%
Coupling Terms
16%
Comb-drive
16%
Resonant Frequency
16%
Cantilever Beam
16%
Jacobian Matrix
16%
Fast Convergence
16%
Micromirror
16%
Lagrangian Description
16%
Piggyback
16%
Squeeze Film
16%
Domain Coupling
16%
Compressible Navier-Stokes Equations
16%
Fluid Damping
16%
Engineering
Electrostatics
100%
Micro-Electro-Mechanical System
100%
Fluid Model
100%
Mechanical Model
100%
Fluidics
33%
Newton's Method
33%
Damping Effect
33%
Quality Factor
16%
Microstructure
16%
Cantilever Beam
16%
Resonant Frequency
16%
Jacobian matrix
16%
Navier-Stokes Equation
16%
Lagrangian Description
16%
Electrical Domain
16%
Micromirrors
16%
Compressible Navier
16%
Dynamical Behavior
16%
Material Science
Microelectromechanical System
100%
Dynamic Analysis
100%
Fluidics
33%
Film
16%
Actuator
16%