Coupled Mesoscale - Continuum Simulations of Copper Electrodeposition in a Trench

Keyphrases

• Concentration Data 33%
• Continuum Simulation 100%
• Copper Electrodeposition 100%
• D-finite 33%
• Diffusive Boundary Layer 33%
• Electrochemical Performance 33%
• Finite Difference Code 66%
• Infill 33%
• Monte Carlo Code 100%
• Numerical Instability 33%
• Order of Magnitude 33%
• Simulated Transport 33%
• Submicron 33%
• Surface Phenomena 33%
• Surface Roughness Evolution 33%
• Transport Phenomena 33%

Engineering

• Boundary Layer 50%
• Filtration 100%
• Length Scale 100%
• Mesoscale 100%
• Multiscale 50%
• Simulation Result 50%
• Transport Phenomena 50%

Material Science

• Boundary Layer 50%
• Electrodeposition 100%
• Finite Difference 100%
• Surface Roughness 50%
• Transport Phenomena 50%