@inproceedings{716547a05c7445d2a6c1def488c607ac,
title = "CORRELATION OF RUTHERFORD BACKSCATTERING AND ELECTRICAL MEASUREMENTS ON Si IMPLANTED InP FOLLOWING RAPID THERMAL AND FURNACE ANNEALING.",
author = "G. Bahir and Merz, \{J. L.\} and Abelson, \{J. R.\} and Sigmon, \{T. W.\}",
year = "1985",
doi = "10.1557/proc-45-297",
language = "English (US)",
isbn = "0931837103",
series = "Materials Research Society Symposia Proceedings",
publisher = "Materials Research Soc",
pages = "297--302",
booktitle = "Materials Research Society Symposia Proceedings",
}