@inproceedings{716547a05c7445d2a6c1def488c607ac,
title = "CORRELATION OF RUTHERFORD BACKSCATTERING AND ELECTRICAL MEASUREMENTS ON Si IMPLANTED InP FOLLOWING RAPID THERMAL AND FURNACE ANNEALING.",
author = "G. Bahir and Merz, {J. L.} and Abelson, {J. R.} and Sigmon, {T. W.}",
year = "1985",
doi = "10.1557/proc-45-297",
language = "English (US)",
isbn = "0931837103",
series = "Materials Research Society Symposia Proceedings",
publisher = "Materials Research Soc",
pages = "297--302",
booktitle = "Materials Research Society Symposia Proceedings",
}