Controlled synthesis of 3d nanostructures using Proximity-field nanoPatterning lithography and graded temperature ALD

R. K. Grubbs, A. R. Ellis, A. M. Sanchez, M. Wiwi, I. El-Kady, K. H.K. Bogart, M. F. Su, C. Christodoulou, M. Taha, D. L. Shir, J. A. Rogers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science