Controlled growth orientation of carbon nanotube pillars by catalyst patterning in microtrenches

Keyphrases

• Microstructure 100%
• Controlled Growth 100%
• Carbon Nanotubes 100%
• Oriented Growth 100%
• Microtrench 100%
• Sidewall 50%
• Thermal Properties 50%
• Thermoelectric Properties 50%
• Excellent Mechanical Properties 50%
• Silicon Wafer 50%
• Sensing Element 50%
• Individual Carbon Nanotube 50%
• MEMS Devices 50%
• Growth Direction 50%
• Catalyst Layer 50%
• Carbon Nanotube Forest 50%
• Electrical-optical Properties 50%
• Etched Substrate 50%
• Dip-pen 50%
• Inclined Structure 50%
• CNT Growth 50%
• Pen Lithography 50%
• Probe Card 50%
• Horizontal Bottom 50%
• Cantilever Spring 50%

Engineering

• Carbon Nanotube 100%
• Microelectromechanical System 25%
• Side Wall 25%
• Transducer 25%
• Lithography 25%
• Silicon Wafer 25%
• Sensing Element 25%
• Individual Carbon 25%
• Catalyst Layer 25%
• Cantilever Spring 25%

Material Science

• Carbon Nanotube 100%
• Microelectromechanical System 25%
• Optical Property 25%
• Lithography 25%
• Thermal Property 25%
• Silicon Wafer 25%
• Transducer 25%