Control of the Nanopositioning Devices

Srinivasa Salapaka, Abu Sebastian

Research output: Contribution to journalConference article

Abstract

We present a paradigm which prescribes a procedure for a systematic design, analysis and development of nanopositioning devices. In this effort, we have used many tools from modern control theory to model devices, to quantify device resolution, bandwidth, range, and robustness, and to tackle undesirable nonlinear effects such as hysteresis and creep. The implementation of this procedure for the simultaneous achievement of robustness, high precision, and high bandwidth objectives is presented. Emphasis is placed on the robustness aspects that make the nanopositioner operable in diverse operating conditions thus alleviating the need for tuning that is present in existing designs. The merits of the paradigm are demonstrated through experimental results.

Original languageEnglish (US)
Pages (from-to)2644-2649
Number of pages6
JournalProceedings of the IEEE Conference on Decision and Control
Volume3
StatePublished - Dec 1 2003
Externally publishedYes
Event42nd IEEE Conference on Decision and Control - Maui, HI, United States
Duration: Dec 9 2003Dec 12 2003

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Modeling and Simulation
  • Control and Optimization

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