Control of high density microcantilever systems

Berkem Mehmet, Hussam Sehwail, Petros G. Voulgaris

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this paper we build on our earlier work on the control of high density, electrostatically actuated, mi-crocantilever arrays and present a simple feedforward PID controller structure that can achieve reasonable performance. This controller is decentralized, thus it does not require any information exchange between neighboring cantilever sites, and yields tracking performance comparable to the performance of the distributed H controller proposed in our earlier study, for reference frequencies as high as 3000 rad/sec. This simpler structure comes with the cost of worse performance at higher frequencies, relatively inferior robustness to phase shifts and a state availability requirement. Therefore, it can be effectively used for relatively lower bandwidth applications where the states are measurable.

Original languageEnglish (US)
Title of host publication2012 American Control Conference, ACC 2012
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages6
ISBN (Print)9781457710957
StatePublished - 2012
Event2012 American Control Conference, ACC 2012 - Montreal, QC, Canada
Duration: Jun 27 2012Jun 29 2012

Publication series

NameProceedings of the American Control Conference
ISSN (Print)0743-1619


Other2012 American Control Conference, ACC 2012
CityMontreal, QC

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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