TY - GEN
T1 - Control of high density microcantilever systems
AU - Mehmet, Berkem
AU - Sehwail, Hussam
AU - Voulgaris, Petros G.
PY - 2012
Y1 - 2012
N2 - In this paper we build on our earlier work on the control of high density, electrostatically actuated, mi-crocantilever arrays and present a simple feedforward PID controller structure that can achieve reasonable performance. This controller is decentralized, thus it does not require any information exchange between neighboring cantilever sites, and yields tracking performance comparable to the performance of the distributed H∞ controller proposed in our earlier study, for reference frequencies as high as 3000 rad/sec. This simpler structure comes with the cost of worse performance at higher frequencies, relatively inferior robustness to phase shifts and a state availability requirement. Therefore, it can be effectively used for relatively lower bandwidth applications where the states are measurable.
AB - In this paper we build on our earlier work on the control of high density, electrostatically actuated, mi-crocantilever arrays and present a simple feedforward PID controller structure that can achieve reasonable performance. This controller is decentralized, thus it does not require any information exchange between neighboring cantilever sites, and yields tracking performance comparable to the performance of the distributed H∞ controller proposed in our earlier study, for reference frequencies as high as 3000 rad/sec. This simpler structure comes with the cost of worse performance at higher frequencies, relatively inferior robustness to phase shifts and a state availability requirement. Therefore, it can be effectively used for relatively lower bandwidth applications where the states are measurable.
UR - http://www.scopus.com/inward/record.url?scp=84869469364&partnerID=8YFLogxK
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U2 - 10.1109/acc.2012.6315378
DO - 10.1109/acc.2012.6315378
M3 - Conference contribution
AN - SCOPUS:84869469364
SN - 9781457710957
T3 - Proceedings of the American Control Conference
SP - 889
EP - 894
BT - 2012 American Control Conference, ACC 2012
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2012 American Control Conference, ACC 2012
Y2 - 27 June 2012 through 29 June 2012
ER -