Contact stiffness calibration platform for nanomechanical property measurements with contact resonance atomic force microscopy

M. R. Rosenberger, S. Chen, C. B. Prater, W. P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a method for calibrating the contact stiffness of an atomic force microscope (AFM) cantilever tip interacting with a surface, which is a critical step in the measurement of mechanical properties at the nanometer scale. The calibration exploits the relationship between contact resonance (CR) frequency and contact stiffness during contact resonance atomic force microscopy (CR-AFM). The calibration platform introduced here consists of a series of rigid copper disks of varying diameter on top of a soft silicone substrate. Larger disks produce larger contact stiffness. We present modeling, fabrication, and characterization, and provide a first demonstration of the efficacy of this approach.

Original languageEnglish (US)
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1235-1238
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - Aug 5 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: Jun 21 2015Jun 25 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period6/21/156/25/15

Keywords

  • Contact resonance
  • atomic force microscopy
  • mechanical property measurement
  • nanomechanics

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Rosenberger, M. R., Chen, S., Prater, C. B., & King, W. P. (2015). Contact stiffness calibration platform for nanomechanical property measurements with contact resonance atomic force microscopy. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 1235-1238). [7181153] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181153