Abstract
Triple patterning lithography (TPL) has been recognized as one of the most promising candidates for 14/10nm technology node. Apart from obtaining legal TPL decompositions, various concerns have been raised by the designers, among them consistently assigning the same pattern for the same type of standard cells and balancing the usage of the three masks are two most critical ones. In this paper, a hybrid approach (SAT followed by a sliding-window approach) is proposed targeting at these two problems. To assign the same pattern for the same type of standard cell, we pre-color the boundary polygons of each type of cell by solving a small SAT problem. Following that we propose a sliding-window based approach to compute a locally balanced decomposition. Our algorithm guarantees to find a feasible solution if one exists. Experimental results verify that the problem can be solved very efficiently with the proposed algorithm. Superior locally balanced decompositions are achieved compared with the previous approach in [19].
| Original language | English (US) |
|---|---|
| Title of host publication | 2013 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2013 - Digest of Technical Papers |
| Pages | 178-185 |
| Number of pages | 8 |
| DOIs | |
| State | Published - Dec 1 2013 |
| Event | 2013 32nd IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2013 - San Jose, CA, United States Duration: Nov 18 2013 → Nov 21 2013 |
Publication series
| Name | IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD |
|---|---|
| ISSN (Print) | 1092-3152 |
Other
| Other | 2013 32nd IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2013 |
|---|---|
| Country | United States |
| City | San Jose, CA |
| Period | 11/18/13 → 11/21/13 |
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ASJC Scopus subject areas
- Software
- Computer Science Applications
- Computer Graphics and Computer-Aided Design
Cite this
Constrained pattern assignment for standard cell based triple patterning lithography. / Tian, Haitong; Du, Yuelin; Zhang, Hongbo; Xiao, Zigang; Wong, Martin D.F.
2013 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2013 - Digest of Technical Papers. 2013. p. 178-185 6691116 (IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Constrained pattern assignment for standard cell based triple patterning lithography
AU - Tian, Haitong
AU - Du, Yuelin
AU - Zhang, Hongbo
AU - Xiao, Zigang
AU - Wong, Martin D.F.
PY - 2013/12/1
Y1 - 2013/12/1
N2 - Triple patterning lithography (TPL) has been recognized as one of the most promising candidates for 14/10nm technology node. Apart from obtaining legal TPL decompositions, various concerns have been raised by the designers, among them consistently assigning the same pattern for the same type of standard cells and balancing the usage of the three masks are two most critical ones. In this paper, a hybrid approach (SAT followed by a sliding-window approach) is proposed targeting at these two problems. To assign the same pattern for the same type of standard cell, we pre-color the boundary polygons of each type of cell by solving a small SAT problem. Following that we propose a sliding-window based approach to compute a locally balanced decomposition. Our algorithm guarantees to find a feasible solution if one exists. Experimental results verify that the problem can be solved very efficiently with the proposed algorithm. Superior locally balanced decompositions are achieved compared with the previous approach in [19].
AB - Triple patterning lithography (TPL) has been recognized as one of the most promising candidates for 14/10nm technology node. Apart from obtaining legal TPL decompositions, various concerns have been raised by the designers, among them consistently assigning the same pattern for the same type of standard cells and balancing the usage of the three masks are two most critical ones. In this paper, a hybrid approach (SAT followed by a sliding-window approach) is proposed targeting at these two problems. To assign the same pattern for the same type of standard cell, we pre-color the boundary polygons of each type of cell by solving a small SAT problem. Following that we propose a sliding-window based approach to compute a locally balanced decomposition. Our algorithm guarantees to find a feasible solution if one exists. Experimental results verify that the problem can be solved very efficiently with the proposed algorithm. Superior locally balanced decompositions are achieved compared with the previous approach in [19].
UR - http://www.scopus.com/inward/record.url?scp=84893382011&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84893382011&partnerID=8YFLogxK
U2 - 10.1109/ICCAD.2013.6691116
DO - 10.1109/ICCAD.2013.6691116
M3 - Conference contribution
AN - SCOPUS:84893382011
SN - 9781479910717
T3 - IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers, ICCAD
SP - 178
EP - 185
BT - 2013 IEEE/ACM International Conference on Computer-Aided Design, ICCAD 2013 - Digest of Technical Papers
ER -