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Comprehensive study of β-Ga2O3 epitaxial growth using a variable closed-coupled showerhead MOCVD reactor

  • Aadil Waseem
  • , Gavin M. Latham
  • , Clifford McAleese
  • , Salwan Omar
  • , Indraneel Sanyal
  • , Daniel M. Dryden
  • , Andrew Pakes
  • , Xiuling Li

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