Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films

D. Abou-Ras; R. Caballero; C. H. Fischer; C. A. Kaufmann; I. Lauermann; R. Mainz; H. Mönig; A. Schöpke; C. Stephan; C. Streeck; S. Schorr; A. Eicke; M. Döbeli; B. Gade; J. Hinrichs; T. Nunney; H. Dijkstra; V. Hoffmann; D. Klemm; V. Efimova; A. Bergmaier; G. Dollinger; T. Wirth; W. Unger; A. A. Rockett; A. Perez-Rodriguez; J. Alvarez-Garcia; V. Izquierdo-Roca; T. Schmid; P. P. Choi; M. Müller; F. Bertram; J. Christen; H. Khatri; R. W. Collins; S. Marsillac; I. Kötschau

doi:10.1017/S1431927611000523

Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films

D. Abou-Ras, R. Caballero, C. H. Fischer, C. A. Kaufmann, I. Lauermann, R. Mainz, H. Mönig, A. Schöpke, C. Stephan, C. Streeck, S. Schorr, A. Eicke, M. Döbeli, B. Gade, J. Hinrichs, T. Nunney, H. Dijkstra, V. Hoffmann, D. Klemm, V. EfimovaA. Bergmaier, G. Dollinger, T. Wirth, W. Unger, A. A. Rockett, A. Perez-Rodriguez, J. Alvarez-Garcia, V. Izquierdo-Roca, T. Schmid, P. P. Choi, M. Müller, F. Bertram, J. Christen, H. Khatri, R. W. Collins, S. Marsillac, I. Kötschau

Research output: Contribution to journal › Article › peer-review

Abstract

The present work shows results on elemental distribution analyses in Cu(In,Ga)Se₂ thin films for solar cells performed by use of wavelength-dispersive and energy-dispersive X-ray spectrometry (EDX) in a scanning electron microscope, EDX in a transmission electron microscope, X-ray photoelectron, angle-dependent soft X-ray emission, secondary ion-mass (SIMS), time-of-flight SIMS, sputtered neutral mass, glow-discharge optical emission and glow-discharge mass, Auger electron, and Rutherford backscattering spectrometry, by use of scanning Auger electron microscopy, Raman depth profiling, and Raman mapping, as well as by use of elastic recoil detection analysis, grazing-incidence X-ray and electron backscatter diffraction, and grazing-incidence X-ray fluorescence analysis. The Cu(In,Ga)Se₂ thin films used for the present comparison were produced during the same identical deposition run and exhibit thicknesses of about 2 μm. The analysis techniques were compared with respect to their spatial and depth resolutions, measuring speeds, availabilities, and detection limits.

Original language	English (US)
Pages (from-to)	728-751
Number of pages	24
Journal	Microscopy and Microanalysis
Volume	17
Issue number	5
DOIs	https://doi.org/10.1017/S1431927611000523
State	Published - Dec 2011
Externally published	Yes

Keywords

chalcopyrite-type
chemical mapping
comparison
Cu(In,Ga)Se
depth profiling
elemental distributions
solar cells
thin films

ASJC Scopus subject areas

Instrumentation

Online availability

10.1017/S1431927611000523

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Abou-Ras, D., Caballero, R., Fischer, C. H., Kaufmann, C. A., Lauermann, I., Mainz, R., Mönig, H., Schöpke, A., Stephan, C., Streeck, C., Schorr, S., Eicke, A., Döbeli, M., Gade, B., Hinrichs, J., Nunney, T., Dijkstra, H., Hoffmann, V., Klemm, D., ... Kötschau, I. (2011). Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films. Microscopy and Microanalysis, 17(5), 728-751. https://doi.org/10.1017/S1431927611000523

Abou-Ras, D, Caballero, R, Fischer, CH, Kaufmann, CA, Lauermann, I, Mainz, R, Mönig, H, Schöpke, A, Stephan, C, Streeck, C, Schorr, S, Eicke, A, Döbeli, M, Gade, B, Hinrichs, J, Nunney, T, Dijkstra, H, Hoffmann, V, Klemm, D, Efimova, V, Bergmaier, A, Dollinger, G, Wirth, T, Unger, W, Rockett, AA, Perez-Rodriguez, A, Alvarez-Garcia, J, Izquierdo-Roca, V, Schmid, T, Choi, PP, Müller, M, Bertram, F, Christen, J, Khatri, H, Collins, RW, Marsillac, S & Kötschau, I 2011, 'Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films', Microscopy and Microanalysis, vol. 17, no. 5, pp. 728-751. https://doi.org/10.1017/S1431927611000523

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title = "Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films",

abstract = "The present work shows results on elemental distribution analyses in Cu(In,Ga)Se2 thin films for solar cells performed by use of wavelength-dispersive and energy-dispersive X-ray spectrometry (EDX) in a scanning electron microscope, EDX in a transmission electron microscope, X-ray photoelectron, angle-dependent soft X-ray emission, secondary ion-mass (SIMS), time-of-flight SIMS, sputtered neutral mass, glow-discharge optical emission and glow-discharge mass, Auger electron, and Rutherford backscattering spectrometry, by use of scanning Auger electron microscopy, Raman depth profiling, and Raman mapping, as well as by use of elastic recoil detection analysis, grazing-incidence X-ray and electron backscatter diffraction, and grazing-incidence X-ray fluorescence analysis. The Cu(In,Ga)Se2 thin films used for the present comparison were produced during the same identical deposition run and exhibit thicknesses of about 2 μm. The analysis techniques were compared with respect to their spatial and depth resolutions, measuring speeds, availabilities, and detection limits.",

keywords = "chalcopyrite-type, chemical mapping, comparison, Cu(In,Ga)Se, depth profiling, elemental distributions, solar cells, thin films",

author = "D. Abou-Ras and R. Caballero and Fischer, {C. H.} and Kaufmann, {C. A.} and I. Lauermann and R. Mainz and H. M{\"o}nig and A. Sch{\"o}pke and C. Stephan and C. Streeck and S. Schorr and A. Eicke and M. D{\"o}beli and B. Gade and J. Hinrichs and T. Nunney and H. Dijkstra and V. Hoffmann and D. Klemm and V. Efimova and A. Bergmaier and G. Dollinger and T. Wirth and W. Unger and Rockett, {A. A.} and A. Perez-Rodriguez and J. Alvarez-Garcia and V. Izquierdo-Roca and T. Schmid and Choi, {P. P.} and M. M{\"u}ller and F. Bertram and J. Christen and H. Khatri and Collins, {R. W.} and S. Marsillac and I. K{\"o}tschau",

year = "2011",

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doi = "10.1017/S1431927611000523",

language = "English (US)",

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T1 - Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films

AU - Abou-Ras, D.

AU - Caballero, R.

AU - Fischer, C. H.

AU - Kaufmann, C. A.

AU - Lauermann, I.

AU - Mainz, R.

AU - Mönig, H.

AU - Schöpke, A.

AU - Stephan, C.

AU - Streeck, C.

AU - Schorr, S.

AU - Eicke, A.

AU - Döbeli, M.

AU - Gade, B.

AU - Hinrichs, J.

AU - Nunney, T.

AU - Dijkstra, H.

AU - Hoffmann, V.

AU - Klemm, D.

AU - Efimova, V.

AU - Bergmaier, A.

AU - Dollinger, G.

AU - Wirth, T.

AU - Unger, W.

AU - Rockett, A. A.

AU - Perez-Rodriguez, A.

AU - Alvarez-Garcia, J.

AU - Izquierdo-Roca, V.

AU - Schmid, T.

AU - Choi, P. P.

AU - Müller, M.

AU - Bertram, F.

AU - Christen, J.

AU - Khatri, H.

AU - Collins, R. W.

AU - Marsillac, S.

AU - Kötschau, I.

PY - 2011/12

Y1 - 2011/12

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AB - The present work shows results on elemental distribution analyses in Cu(In,Ga)Se2 thin films for solar cells performed by use of wavelength-dispersive and energy-dispersive X-ray spectrometry (EDX) in a scanning electron microscope, EDX in a transmission electron microscope, X-ray photoelectron, angle-dependent soft X-ray emission, secondary ion-mass (SIMS), time-of-flight SIMS, sputtered neutral mass, glow-discharge optical emission and glow-discharge mass, Auger electron, and Rutherford backscattering spectrometry, by use of scanning Auger electron microscopy, Raman depth profiling, and Raman mapping, as well as by use of elastic recoil detection analysis, grazing-incidence X-ray and electron backscatter diffraction, and grazing-incidence X-ray fluorescence analysis. The Cu(In,Ga)Se2 thin films used for the present comparison were produced during the same identical deposition run and exhibit thicknesses of about 2 μm. The analysis techniques were compared with respect to their spatial and depth resolutions, measuring speeds, availabilities, and detection limits.

KW - chalcopyrite-type

KW - chemical mapping

KW - comparison

KW - Cu(In,Ga)Se

KW - depth profiling

KW - elemental distributions

KW - solar cells

KW - thin films

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DO - 10.1017/S1431927611000523

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AN - SCOPUS:80054878532

SN - 1431-9276

VL - 17

SP - 728

EP - 751

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - 5

ER -

Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films

Abstract

Keywords

ASJC Scopus subject areas

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