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Composite patterning devices for soft lithography
Etienne Menard (Inventor), John A Rogers (Inventor)
University of Illinois Urbana-Champaign
Materials Science and Engineering
Research output
:
Patent
Overview
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Physics & Astronomy
lithography
100%
inventions
77%
composite materials
73%
rigidity
30%
thermal expansion
25%
thermodynamic properties
24%
modulus of elasticity
24%
mechanical properties
20%
high resolution
18%
polymers
17%
coefficients
16%