Complex three-dimensional conformal surfaces formed by atomic layer deposition: Computation and experimental verification

Andrew Brzezinski, Ying Chieh Chen, Pierre Wiltzius, Paul V. Braun

Research output: Contribution to journalArticlepeer-review

Abstract

Atomic layer deposition in complex three-dimensional porous materials is useful for manipulating properties such as pore size, pore connectivity, density, and dielectric constant. In order to calculate a material's properties it is necessary to determine the material distribution. A generally applicable algorithm for determining the material distribution and pore connectivity is presented. Calculations using the algorithm compared favorably with experimental results for the important case of infilling dielectric material into three-dimensional photonic crystal templates.

Original languageEnglish (US)
Pages (from-to)9126-9130
Number of pages5
JournalJournal of Materials Chemistry
Volume19
Issue number48
DOIs
StatePublished - 2009

ASJC Scopus subject areas

  • General Chemistry
  • Materials Chemistry

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