Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics

Jinhong Kim, Andrey E. Mironov, Jin H. Cho, Dane S. Sievers, Cyrus M. Herring, Sehyun Park, Peter P. Sun, Zhihu Liang, Wenyuan Chen, Sung Jin Park, J. Gary Eden

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