@article{cb6892c6a67d453d99f1f354e6bda00a,
title = "Commercialization of microcavity plasma devices and arrays: Systems for VUV photolithography and nanopatterning, disinfection of drinking water and air, and biofilm deactivation for medical therapeutics",
abstract = "A little more than two decades after the introduction of the first microcavity plasma devices, a growing body of commercial products based on the remarkable properties of these low-temperature, atmospheric plasmas is now available. Following a brief review of early microplasma lamp development, this article describes microplasma-based devices and systems currently being manufactured for applications in photolithography, photopatterning, and other nanofabrication processes, such as atomic layer deposition, spectroscopic identification and analysis of materials (including wide bandgap crystals), the disinfection of drinking water in off-grid communities, deactivating COVID-19 and other pathogens in air and on surfaces in public spaces, and vacuum ultraviolet lamps for driving atomic clocks. The microplasma-based treatment of otitis media in the human ear will also be discussed.",
keywords = "biofilm deactivation, disinfection, microplasma, ozone generation, photolithography, vacuum ultraviolet",
author = "Jinhong Kim and Mironov, {Andrey E.} and Cho, {Jin H.} and Sievers, {Dane S.} and Herring, {Cyrus M.} and Sehyun Park and Sun, {Peter P.} and Zhihu Liang and Wenyuan Chen and Park, {Sung Jin} and Eden, {J. Gary}",
note = "Funding Information: The support of the discovery and development of microcavity plasmas by the U.S. Air Force Office of Scientific Research (H. Schlossberg, J. Luginsland, J. Marshall, and M. Birkan), the National Institutes of Health, the U.S. Department of Energy, the Defense Advanced Research Projects Agency (DARPA), and the NASA Jet Propulsion Laboratory under grants FA9550-14-1-0002, 2R42AI125006-02A1, DE-SC0021718, and JPL No. 1562980, respectively, is gratefully acknowledged. Open Access Funding provided by Big Ten Academic Alliance hybrid - University of Illinois Urbana-Champaign within the TA16 Agreement. Funding Information: The support of the discovery and development of microcavity plasmas by the U.S. Air Force Office of Scientific Research (H. Schlossberg, J. Luginsland, J. Marshall, and M. Birkan), the National Institutes of Health, the U.S. Department of Energy, the Defense Advanced Research Projects Agency (DARPA), and the NASA Jet Propulsion Laboratory under grants FA9550‐14‐1‐0002, 2R42AI125006‐02A1, DE‐SC0021718, and JPL No. 1562980, respectively, is gratefully acknowledged. Open Access Funding provided by Big Ten Academic Alliance hybrid ‐ University of Illinois Urbana‐Champaign within the TA16 Agreement. Publisher Copyright: {\textcopyright} 2022 The Authors. Plasma Processes and Polymers published by Wiley-VCH GmbH.",
year = "2022",
month = oct,
doi = "10.1002/ppap.202200075",
language = "English (US)",
volume = "19",
journal = "Plasma Processes and Polymers",
issn = "1612-8850",
publisher = "Wiley-VCH",
number = "10",
}