CMP aware shuttle mask floorplanning

Keyphrases

• Floorplanning 100%
• Topographic Variation 66%
• Wafer 33%
• Low Volume 33%
• Low-pass Filter 33%
• Putting 33%
• Manufacturability 33%
• 3-step 33%
• Linear Programming Method 33%
• Design Prototypes 33%
• Simulated Annealing Search 33%
• Multiple Projects 33%
• Industry Data 33%
• Economic Solutions 33%
• Mask Cost 33%
• CMP Model 33%
• Oxide CMP 33%
• Post-CMP 33%
• Enclosing Rectangle 33%
• Rectangle Packing Problem 33%

Computer Science

• Floorplanning 100%
• Programming Method 50%
• Linear Programming 50%
• Simulated Annealing 50%
• Packing Problem 50%
• Multiple Project 50%
• Prototype Design 50%
• Optimal Amount 50%
• Floorplanning Problem 50%
• Rectangle Packing 50%
• Enclosing Rectangle 50%

Engineering

• Linear Programming 100%
• Step Procedure 100%
• Lowpass Filter 100%
• Manufacturability 100%