CMOS-integrated small-capacitance germanium waveguide photodetector for optical interconnects

Solomon Assefa, Fengnian Xia, S. W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, Yurii A. Vlasov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Compact germanium waveguide photodetector with 38fF capacitance, 40Gbps bandwidth and 0.4A/W responsivity is demonstrated. High-quality Ge-on-insulator single-crystalline layer was monolithically integrated into front-end CMOS process by lateral seeded crystallization.

Original languageEnglish (US)
Title of host publication2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
StatePublished - 2009
Externally publishedYes
Event2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009 - Baltimore, MD, United States
Duration: Jun 2 2009Jun 4 2009

Publication series

Name2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009

Other

Other2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum Electronics and Laser Science Conference, CLEO/QELS 2009
Country/TerritoryUnited States
CityBaltimore, MD
Period6/2/096/4/09

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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