CMOS-integrated small-capacitance germanium waveguide photodetector for optical interconnects

Solomon Assefa, Fengnian Xia, S. W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, Yurii A. Vlasov

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Compact germanium waveguide photodetector with 38fF capacitance, 40Gbps bandwidth and 0.4A/W responsivity is demonstrated. High-quality Ge-on-insulator singlecrystalline layer was monolithically integrated into front-end CMOS process by lateral seeded crystallization.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2009
StatePublished - Dec 1 2009
Externally publishedYes
EventConference on Lasers and Electro-Optics, CLEO 2009 - Baltimore, MD, United States
Duration: May 31 2009Jun 5 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2009
CountryUnited States
CityBaltimore, MD
Period5/31/096/5/09

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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