CMOS-integrated high-speed MSM germanium waveguide photodetector

Solomon Assefa, Fengnian Xia, Stephen W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, Yurii A. Vlasov

Research output: Contribution to journalArticlepeer-review


A compact waveguide-integrated Germanium-on-insulator (GOI) photodetector with 10 ± 2fF capacitance and operating at 40Gbps is demonstrated. Monolithic integration of thin single-crystalline Ge into frontend CMOS stack was achieved by rapid melt growth during source-drain implant activation anneal.

Original languageEnglish (US)
Pages (from-to)4986-4999
Number of pages14
JournalOptics Express
Issue number5
StatePublished - Mar 1 2010
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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