CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects

Solomon Assefa; Fengnian Xia; S. W. Bedell; Ying Zhang; Teya Topuria; Philip M. Rice; Yurii A. Vlasov

doi:10.1364/ofc.2009.omr4

CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects

Solomon Assefa, Fengnian Xia, S. W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, Yurii A. Vlasov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Compact (0.7μ m× 20μ m) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.

Original language	English (US)
Title of host publication	2009 Conference on Optical Fiber Communication, OFC 2009
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781557528650
DOIs	https://doi.org/10.1364/ofc.2009.omr4
State	Published - 2009
Externally published	Yes
Event	2009 Conference on Optical Fiber Communication, OFC 2009 - San Diego, CA, United States Duration: Mar 22 2009 → Mar 26 2009

Publication series

Name	Conference on Optical Fiber Communication, Technical Digest Series

Other

Other	2009 Conference on Optical Fiber Communication, OFC 2009
Country/Territory	United States
City	San Diego, CA
Period	3/22/09 → 3/26/09

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Online availability

10.1364/ofc.2009.omr4

Library availability

Discover UIUC Full Text

Cite this

Assefa, S., Xia, F., Bedell, S. W., Zhang, Y., Topuria, T., Rice, P. M., & Vlasov, Y. A. (2009). CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects. In 2009 Conference on Optical Fiber Communication, OFC 2009 [5032585] (Conference on Optical Fiber Communication, Technical Digest Series). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1364/ofc.2009.omr4

CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects. / Assefa, Solomon; Xia, Fengnian; Bedell, S. W. et al.

2009 Conference on Optical Fiber Communication, OFC 2009. Institute of Electrical and Electronics Engineers Inc., 2009. 5032585 (Conference on Optical Fiber Communication, Technical Digest Series).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Assefa, S, Xia, F, Bedell, SW, Zhang, Y, Topuria, T, Rice, PM & Vlasov, YA 2009, CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects. in 2009 Conference on Optical Fiber Communication, OFC 2009., 5032585, Conference on Optical Fiber Communication, Technical Digest Series, Institute of Electrical and Electronics Engineers Inc., 2009 Conference on Optical Fiber Communication, OFC 2009, San Diego, CA, United States, 3/22/09. https://doi.org/10.1364/ofc.2009.omr4

Assefa S, Xia F, Bedell SW, Zhang Y, Topuria T, Rice PM et al. CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects. In 2009 Conference on Optical Fiber Communication, OFC 2009. Institute of Electrical and Electronics Engineers Inc. 2009. 5032585. (Conference on Optical Fiber Communication, Technical Digest Series). doi: 10.1364/ofc.2009.omr4

@inproceedings{04aaf43d06c74494983a18964ee54769,

title = "CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects",

abstract = "Compact (0.7μ m× 20μ m) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.",

author = "Solomon Assefa and Fengnian Xia and Bedell, {S. W.} and Ying Zhang and Teya Topuria and Rice, {Philip M.} and Vlasov, {Yurii A.}",

year = "2009",

doi = "10.1364/ofc.2009.omr4",

language = "English (US)",

isbn = "9781557528650",

series = "Conference on Optical Fiber Communication, Technical Digest Series",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2009 Conference on Optical Fiber Communication, OFC 2009",

address = "United States",

note = "2009 Conference on Optical Fiber Communication, OFC 2009 ; Conference date: 22-03-2009 Through 26-03-2009",

}

TY - GEN

T1 - CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects

AU - Assefa, Solomon

AU - Xia, Fengnian

AU - Bedell, S. W.

AU - Zhang, Ying

AU - Topuria, Teya

AU - Rice, Philip M.

AU - Vlasov, Yurii A.

PY - 2009

Y1 - 2009

N2 - Compact (0.7μ m× 20μ m) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.

AB - Compact (0.7μ m× 20μ m) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into the CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.

UR - http://www.scopus.com/inward/record.url?scp=70349277021&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70349277021&partnerID=8YFLogxK

U2 - 10.1364/ofc.2009.omr4

DO - 10.1364/ofc.2009.omr4

M3 - Conference contribution

AN - SCOPUS:70349277021

SN - 9781557528650

T3 - Conference on Optical Fiber Communication, Technical Digest Series

BT - 2009 Conference on Optical Fiber Communication, OFC 2009

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2009 Conference on Optical Fiber Communication, OFC 2009

Y2 - 22 March 2009 through 26 March 2009

ER -

CMOS-integrated 40GHz germanium waveguide photodetector for On-chip optical interconnects

Abstract

Publication series

Other

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this