CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications

Wen Huang, Jingchao Zhou, Paul Froeter, Kathy Walsh, Siyu Liu, Julian Michaels, Moyang Li, Songbin Gong, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

On-chip copper (Cu) based self-rolled-up membrane (S-RuM) inductors are demonstrated for the first time. Compared to the gold (Au) based S-RuM inductor, device structures and fabrication processes are re-designed to realize CMOS compatibility by switching conduction metal to Cu and overcoming related processing challenges. Performance enhancements include ∼44% reduction of conduction layer resistivity compared to Au-based with the same thickness, and a clear path to 100% fabrication yield are achieved. RF measurement shows as high as ∼ 61nH/mm2 inductance density with just a 2-turn structure for these air-core S-RuM inductors. The achieved inductance is in the range from 0.3nH to 1nH. The best self-resonant-frequency (SRF) and quality factor (Q factor) of 1nH device is ∼23GHz and ∼2.4@5GHz, respectively. Much better performance can be readily obtained by rolling up more turns and integrating soft magnetic material thin film and core. Results show that Cu S-RuM inductor is very promising to replace on-chip planar inductor with better performance as a new industry standard.

Original languageEnglish (US)
Title of host publication2017 IEEE MTT-S International Microwave Symposium, IMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1645-1648
Number of pages4
ISBN (Electronic)9781509063604
DOIs
StatePublished - Oct 4 2017
Event2017 IEEE MTT-S International Microwave Symposium, IMS 2017 - Honololu, United States
Duration: Jun 4 2017Jun 9 2017

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X

Other

Other2017 IEEE MTT-S International Microwave Symposium, IMS 2017
CountryUnited States
CityHonololu
Period6/4/176/9/17

Fingerprint

inductors
CMOS
chips
Membranes
membranes
Inductance
inductance
Soft magnetic materials
Magnetic thin films
Fabrication
conduction
fabrication
Natural frequencies
magnetic materials
Gold
compatibility
resonant frequencies
Q factors
Copper
industries

Keywords

  • CMOS compatible
  • Copper
  • High fabrication yield
  • Inductor
  • RF/mm-Wave frequency
  • Self-rolled-up

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Huang, W., Zhou, J., Froeter, P., Walsh, K., Liu, S., Michaels, J., ... Li, X. (2017). CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications. In 2017 IEEE MTT-S International Microwave Symposium, IMS 2017 (pp. 1645-1648). [8058953] (IEEE MTT-S International Microwave Symposium Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MWSYM.2017.8058953

CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications. / Huang, Wen; Zhou, Jingchao; Froeter, Paul; Walsh, Kathy; Liu, Siyu; Michaels, Julian; Li, Moyang; Gong, Songbin; Li, Xiuling.

2017 IEEE MTT-S International Microwave Symposium, IMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1645-1648 8058953 (IEEE MTT-S International Microwave Symposium Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Huang, W, Zhou, J, Froeter, P, Walsh, K, Liu, S, Michaels, J, Li, M, Gong, S & Li, X 2017, CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications. in 2017 IEEE MTT-S International Microwave Symposium, IMS 2017., 8058953, IEEE MTT-S International Microwave Symposium Digest, Institute of Electrical and Electronics Engineers Inc., pp. 1645-1648, 2017 IEEE MTT-S International Microwave Symposium, IMS 2017, Honololu, United States, 6/4/17. https://doi.org/10.1109/MWSYM.2017.8058953
Huang W, Zhou J, Froeter P, Walsh K, Liu S, Michaels J et al. CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications. In 2017 IEEE MTT-S International Microwave Symposium, IMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1645-1648. 8058953. (IEEE MTT-S International Microwave Symposium Digest). https://doi.org/10.1109/MWSYM.2017.8058953
Huang, Wen ; Zhou, Jingchao ; Froeter, Paul ; Walsh, Kathy ; Liu, Siyu ; Michaels, Julian ; Li, Moyang ; Gong, Songbin ; Li, Xiuling. / CMOS-compatible on-chip self-rolled-up inductors for RF/mm-wave applications. 2017 IEEE MTT-S International Microwave Symposium, IMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1645-1648 (IEEE MTT-S International Microwave Symposium Digest).
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