@inproceedings{e66553727bb64c09813bb64beea8f2f4,
title = "CMOS-compatible dual-resonator mems temperature sensor with milli-degree accuracy",
abstract = "This paper presents a dual-resonator design which, not only enables temperature sensing of the resonators but also acts as a general-purpose temperature sensor. The frequency stability of the temperature compensated resonator depends on the accuracy with which the temperature of the resonator is measured. The dual-resonator design, described here, produces temperature-dependent beat frequency which is inherent to the resonator and thus eliminates any spatial and temporal thermal lag associated with the use of an external temperature sensor. Furthermore, this design can also be used as a CMOS-compatible digital temperature sensor. In this work, we achieved the sensor resolution of approximately 0.008°C which is comparable to that of the best CMOS temperature sensors available today.",
keywords = "Beat frequency, Digital temperature sensor, Dual resonator, MEMS, Microresonator",
author = "Jha, {C. M.} and G. Bahl and R. Melamud and Chandorkar, {S. A.} and Hopcroft, {M. A.} and B. Kim and M. Agarwal and J. Salvia and H. Mehta and Kenny, {T. W.}",
year = "2007",
doi = "10.1109/SENSOR.2007.4300111",
language = "English (US)",
isbn = "1424408423",
series = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
pages = "229--232",
booktitle = "TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems",
note = "4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 ; Conference date: 10-06-2007 Through 14-06-2007",
}