Cluster generator

Ivan G Petrov (Inventor), Todor I Donchev (Inventor)

Research output: Patent


Described herein is an apparatus and a method for producing atom clusters based on a gas discharge within a hollow cathode. The hollow cathode includes one or more walls. The one or more walls define a sputtering chamber within the hollow cathode and include a material to be sputtered. A hollow anode is positioned at an end of the sputtering chamber, and atom clusters are formed when a gas discharge is generated between the hollow anode and the hollow cathode.
Original languageEnglish (US)
U.S. patent number7951276
StatePublished - May 31 2011


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