Close-packed arrays of plasma jets emanating from microchannels in a transparent polymer

P. P. Sun, J. H. Cho, C. H. Park, S. J. Park, J. G. Eden

Research output: Contribution to journalArticlepeer-review

Abstract

Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 ?8 with a packing density of ∼160 cm?2 have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet (γ ≥ 250 nm), microchannel devices ≤ 350 ?m in diameter generate plasma in He feedstock gas with a backing pressure of 760-900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He (21,3S) and He2 (α3⊃+u ) excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 ±5 array is 3.8 ±0.2 mm when the He backing pressure is 840 ±20 Torr. Relative to previous jet array designs, this technology increases the jet packing density bymore than an order of magnitude and yet jet-jet interactions are not observed.

Original languageEnglish (US)
Article number6343235
Pages (from-to)2946-2950
Number of pages5
JournalIEEE Transactions on Plasma Science
Volume40
Issue number11 PART1
DOIs
StatePublished - 2012

Keywords

  • Jet arrays
  • microchannel
  • microplasma jet

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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