Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 ?8 with a packing density of ∼160 cm?2 have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet (γ ≥ 250 nm), microchannel devices ≤ 350 ?m in diameter generate plasma in He feedstock gas with a backing pressure of 760-900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He (21,3S) and He2 (α3⊃+u ) excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 ±5 array is 3.8 ±0.2 mm when the He backing pressure is 840 ±20 Torr. Relative to previous jet array designs, this technology increases the jet packing density bymore than an order of magnitude and yet jet-jet interactions are not observed.
- Jet arrays
- microplasma jet
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Condensed Matter Physics