Close-packed arrays of plasma jets emanating from microchannels in a transparent polymer

P. P. Sun; J. H. Cho; C. H. Park; S. J. Park; J. G. Eden

doi:10.1109/TPS.2012.2218130

Close-packed arrays of plasma jets emanating from microchannels in a transparent polymer

P. P. Sun, J. H. Cho, C. H. Park, S. J. Park, J. G. Eden

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 ?8 with a packing density of ∼160 cm^?2 have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet (γ ≥ 250 nm), microchannel devices ≤ 350 ?m in diameter generate plasma in He feedstock gas with a backing pressure of 760-900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He (2^1,3S) and He2 (α3⊃^+u ) excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 ±5 array is 3.8 ±0.2 mm when the He backing pressure is 840 ±20 Torr. Relative to previous jet array designs, this technology increases the jet packing density bymore than an order of magnitude and yet jet-jet interactions are not observed.

Original language	English (US)
Article number	6343235
Pages (from-to)	2946-2950
Number of pages	5
Journal	IEEE Transactions on Plasma Science
Volume	40
Issue number	11 PART1
DOIs	https://doi.org/10.1109/TPS.2012.2218130
State	Published - 2012

Keywords

Jet arrays
microchannel
microplasma jet

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

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title = "Close-packed arrays of plasma jets emanating from microchannels in a transparent polymer",

abstract = "Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 ?8 with a packing density of ∼160 cm?2 have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet (γ ≥ 250 nm), microchannel devices ≤ 350 ?m in diameter generate plasma in He feedstock gas with a backing pressure of 760-900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He (21,3S) and He2 (α3⊃+u ) excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 ±5 array is 3.8 ±0.2 mm when the He backing pressure is 840 ±20 Torr. Relative to previous jet array designs, this technology increases the jet packing density bymore than an order of magnitude and yet jet-jet interactions are not observed.",

keywords = "Jet arrays, microchannel, microplasma jet",

author = "Sun, {P. P.} and Cho, {J. H.} and Park, {C. H.} and Park, {S. J.} and Eden, {J. G.}",

note = "Funding Information: Manuscript received April 26, 2012; revised August 13, 2012; accepted August 22, 2012. Date of current version November 6, 2012. This work was supported by the U.S. Air Force Office of Scientific Research (H.R. Schlossberg) under Grant FA9550-10-1-0456.",

year = "2012",

doi = "10.1109/TPS.2012.2218130",

language = "English (US)",

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AU - Sun, P. P.

AU - Cho, J. H.

AU - Park, C. H.

AU - Park, S. J.

AU - Eden, J. G.

N1 - Funding Information: Manuscript received April 26, 2012; revised August 13, 2012; accepted August 22, 2012. Date of current version November 6, 2012. This work was supported by the U.S. Air Force Office of Scientific Research (H.R. Schlossberg) under Grant FA9550-10-1-0456.

PY - 2012

Y1 - 2012

N2 - Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 ?8 with a packing density of ∼160 cm?2 have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet (γ ≥ 250 nm), microchannel devices ≤ 350 ?m in diameter generate plasma in He feedstock gas with a backing pressure of 760-900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He (21,3S) and He2 (α3⊃+u ) excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 ±5 array is 3.8 ±0.2 mm when the He backing pressure is 840 ±20 Torr. Relative to previous jet array designs, this technology increases the jet packing density bymore than an order of magnitude and yet jet-jet interactions are not observed.

AB - Close-packed arrays of microplasma jets, propagating into atmospheric air with uniform plume length and luminosity, have been generated in cylindrical microchannels and characterized. Arrays as large as 8 ?8 with a packing density of ∼160 cm?2 have been demonstrated to date. Fabricated in a molded flexible polymer that is transparent deep into the ultraviolet (γ ≥ 250 nm), microchannel devices ≤ 350 ?m in diameter generate plasma in He feedstock gas with a backing pressure of 760-900 Torr and flow rates up to 4.6 standard liters per minute. Chemical kinetics of the He (21,3S) and He2 (α3⊃+u ) excited species interacting with laboratory air has been examined by optical emission spectroscopy. The maximum jet length for a 5 ±5 array is 3.8 ±0.2 mm when the He backing pressure is 840 ±20 Torr. Relative to previous jet array designs, this technology increases the jet packing density bymore than an order of magnitude and yet jet-jet interactions are not observed.

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Close-packed arrays of plasma jets emanating from microchannels in a transparent polymer

Abstract

Keywords

ASJC Scopus subject areas

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