Chip-scale resonant gyrator for passive non-reciprocal devices

Songbin Gong (Inventor), Ruochen Lu (Inventor), Tomas Manzaneque Garcia (Inventor), Cheng Tu (Inventor), Daniel Philip Shoemaker (Inventor), Chengxi Zhao (Inventor)

Research output: Patent


A method includes depositing a first metal layer on a semiconductor substrate; etching the first metal layer to form a first electrode having a first lead; depositing a piezoelectric layer on the semiconductor substrate and first electrode; etching the piezoelectric layer to a shape of the gyrator to be formed within the circulator; depositing a second metal layer on the piezoelectric layer; etching the second metal layer to form a second electrode having a second lead, the second electrode being positioned opposite the first electrode, wherein the first lead and the second lead form an electrical port; depositing a magnetostrictive layer on the second electrode; etching the magnetostrictive layer to approximately the shape of the piezoelectric layer; depositing a third metal layer on the magnetostrictive layer; and etching the third metal layer to form a metal coil that has a gap on one side to define a magnetic port.
Original languageEnglish (US)
U.S. patent number11695382
StatePublished - Jul 4 2023


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