Chip-less wireless electronic skins by remote epitaxial freestanding compound semiconductors

Yeongin Kim, Jun Min Suh, Jiho Shin, Yunpeng Liu, Hanwool Yeon, Kuan Qiao, Hyun S. Kum, Chansoo Kim, Han Eol Lee, Chanyeol Choi, Hyunseok Kim, Doyoon Lee, Jaeyong Lee, Ji Hoon Kang, Bo In Park, Sungsu Kang, Jihoon Kim, Sungkyu Kim, Joshua A. Perozek, Kejia WangYongmo Park, Kumar Kishen, Lingping Kong, Tomás Palacios, Jungwon Park, Min Chul Park, Hyung Jun Kim, Yun Seog Lee, Kyusang Lee, Sang Hoon Bae, Wei Kong, Jiyeon Han, Jeehwan Kim

Research output: Contribution to journalArticlepeer-review

Abstract

Recent advances in flexible and stretchable electronics have led to a surge of electronic skin (e-skin)–based health monitoring platforms. Conventional wireless e-skins rely on rigid integrated circuit chips that compromise the overall flexibility and consume considerable power. Chip-less wireless e-skins based on inductor-capacitor resonators are limited to mechanical sensors with low sensitivities. We report a chip-less wireless e-skin based on surface acoustic wave sensors made of freestanding ultrathin single-crystalline piezoelectric gallium nitride membranes. Surface acoustic wave–based e-skin offers highly sensitive, low-power, and long-term sensing of strain, ultraviolet light, and ion concentrations in sweat. We demonstrate weeklong monitoring of pulse. These results present routes to inexpensive and versatile low-power, high-sensitivity platforms for wireless health monitoring devices.

Original languageEnglish (US)
Pages (from-to)859-864
Number of pages6
JournalScience
Volume377
Issue number6608
DOIs
StatePublished - Aug 19 2022
Externally publishedYes

ASJC Scopus subject areas

  • General

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