Abstract
An overview is given on the design, fabrication, and testing of 2-element, and 8-element μCANARY sensor chips and address electronics. The detailed performance characterization of μCANARY sensors for vapor and liquid phase detection is presented. Further, data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity are given.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 151-162 |
| Number of pages | 12 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4036 |
| DOIs | |
| State | Published - 2000 |
| Externally published | Yes |
| Event | Chemical and Biological Sensing - Orlando, FL, USA Duration: Apr 24 2000 → Apr 25 2000 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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