Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Brian T Cunningham, Richard Kant, Chris Daly, Marc Weinberg, Jane Pepper, Christopher Clapp, Rob Bousquet, Brenda Hugh

Research output: Contribution to journalConference articlepeer-review


An overview is given on the design, fabrication, and testing of 2-element, and 8-element μCANARY sensor chips and address electronics. The detailed performance characterization of μCANARY sensors for vapor and liquid phase detection is presented. Further, data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity are given.

Original languageEnglish (US)
Pages (from-to)151-162
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2000
Externally publishedYes
EventChemical and Biological Sensing - Orlando, FL, USA
Duration: Apr 24 2000Apr 25 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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