Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Brian Cunningham; Richard Kant; Chris Daly; Marc Weinberg; Jane Pepper; Christopher Clapp; Rob Bousquet; Brenda Hugh

doi:10.1117/12.394060

Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Brian Cunningham, Richard Kant, Chris Daly, Marc Weinberg, Jane Pepper, Christopher Clapp, Rob Bousquet, Brenda Hugh

Research output: Contribution to journal › Conference article › peer-review

Abstract

An overview is given on the design, fabrication, and testing of 2-element, and 8-element μCANARY sensor chips and address electronics. The detailed performance characterization of μCANARY sensors for vapor and liquid phase detection is presented. Further, data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity are given.

Original language	English (US)
Pages (from-to)	151-162
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4036
DOIs	https://doi.org/10.1117/12.394060
State	Published - 2000
Externally published	Yes
Event	Chemical and Biological Sensing - Orlando, FL, USA Duration: Apr 24 2000 → Apr 25 2000

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.394060

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abstract = "An overview is given on the design, fabrication, and testing of 2-element, and 8-element μCANARY sensor chips and address electronics. The detailed performance characterization of μCANARY sensors for vapor and liquid phase detection is presented. Further, data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity are given.",

author = "Brian Cunningham and Richard Kant and Chris Daly and Marc Weinberg and Jane Pepper and Christopher Clapp and Rob Bousquet and Brenda Hugh",

year = "2000",

doi = "10.1117/12.394060",

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volume = "4036",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Chemical and Biological Sensing ; Conference date: 24-04-2000 Through 25-04-2000",

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AU - Cunningham, Brian

AU - Kant, Richard

AU - Daly, Chris

AU - Weinberg, Marc

AU - Pepper, Jane

AU - Clapp, Christopher

AU - Bousquet, Rob

AU - Hugh, Brenda

PY - 2000

Y1 - 2000

N2 - An overview is given on the design, fabrication, and testing of 2-element, and 8-element μCANARY sensor chips and address electronics. The detailed performance characterization of μCANARY sensors for vapor and liquid phase detection is presented. Further, data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity are given.

AB - An overview is given on the design, fabrication, and testing of 2-element, and 8-element μCANARY sensor chips and address electronics. The detailed performance characterization of μCANARY sensors for vapor and liquid phase detection is presented. Further, data describing temperature dependence, long term/short term drift stability, detection limits, detection linearity, and vapor selectivity are given.

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M3 - Conference article

AN - SCOPUS:0033683183

SN - 0277-786X

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EP - 162

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Chemical and Biological Sensing

Y2 - 24 April 2000 through 25 April 2000

ER -

Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Abstract

ASJC Scopus subject areas

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