Chemical Vapor Deposition of Copper and Copper Oxide Thin Films from Copper(I) tert-Butoxide

Patrick M. Jeffries, Gregory S Girolami

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)8-10
Number of pages3
JournalChemistry of Materials
Volume1
Issue number1
DOIs
StatePublished - Jan 1989

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry

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