Charge-drift elimination in resonant electrostatic MEMS

Gaurav Bahl, James Salvia, Igor Bargatin, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, Matthew A. Hopcroft, Rajendar Bahl, Roger T. Howe, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Physics & Astronomy

Engineering & Materials Science