Charge-drift elimination in resonant electrostatic MEMS

Gaurav Bahl, James Salvia, Igor Bargatin, Shingo Yoneoka, Renata Melamud, Bongsang Kim, Saurabh Chandorkar, Matthew A. Hopcroft, Rajendar Bahl, Roger T. Howe, Thomas W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a biasing technique and a novel oscillator architecture for the elimination of frequency drifts in resonant electrostatic MEMS that are caused by the motion of charge present within dielectrics. We demonstrate more than two orders of magnitude improvement in stability for a test device operating as a frequency reference at 1.077 MHz, reducing frequency drift from more than 100 Hz over 3 hours using traditional actuation, down to less than 1.5 Hz variation over 40 hours using the new technique.

Original languageEnglish (US)
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages108-111
Number of pages4
DOIs
StatePublished - Jun 1 2010
Externally publishedYes
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/TerritoryChina
CityHong Kong
Period1/24/101/28/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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