@article{4a2d3bc0dd484e368540245fca8dbe06,
title = "Characterization of sidewall roughness of InP/InGaAsP etched using inductively coupled plasma for low loss optical waveguide applications",
author = "Bae, {J. W.} and W. Zhao and Jang, {J. H.} and I. Adesida and A. Lepore and M. Kwakernaak and Abeles, {J. H.}",
year = "2003",
doi = "10.1116/1.1625956",
language = "English (US)",
volume = "21",
pages = "2888--2891",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}