Characterization of magnetron-sputtered partially ionized aluminum deposition

D. B. Hayden, D. R. Juliano, K. M. Green, D. N. Ruzic, C. A. Weiss, K. A. Ashtiani, T. J. Licata

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Characterization of magnetron-sputtered partially ionized aluminum deposition'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds