Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors

Jungchul Lee, Kianoush Naeli, Hanif Hunter, John Berg, Tanya Wright, Christophe Courcimault, Nisarga Naik, Mark Allen, Oliver Brand, Ari Glezer, William P. King

Research output: Contribution to journalArticlepeer-review


This paper reports the development of microelectromechanical metrology tools to characterize liquid and gaseous jets generated from microfabricated nozzles with diameters ranging from 1 to 12 μm. Microcantilever sensors with either piezoresistive elements or integrated heating elements have been fabricated and applied to measure thrusts, velocities, and heat transfer characteristics of micro/nanojets. Piezoresistive cantilever measurements showed that liquid butane microjets from a 6 μm diameter nozzle achieved velocities 40-60 m/s for driving pressures 0.6-1.4 MPa. Jet velocities estimated from cantilever measurements agreed well with shadowgraphy results within 12.5% without any correction factor. A microcantilever with integrated heating elements measured cooling capacities of liquid butane microjets on the order of 10-5 W/K.

Original languageEnglish (US)
Pages (from-to)128-139
Number of pages12
JournalSensors and Actuators, A: Physical
Issue number1
StatePublished - Feb 28 2007
Externally publishedYes


  • Hot-wire
  • MEMS
  • Microcantilever
  • Microjets
  • Nanojets
  • Shadowgraphy
  • Thrust

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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