Abstract
This paper reports the development of microelectromechanical metrology tools to characterize liquid and gaseous jets generated from microfabricated nozzles with diameters ranging from 1 to 12 μm. Microcantilever sensors with either piezoresistive elements or integrated heating elements have been fabricated and applied to measure thrusts, velocities, and heat transfer characteristics of micro/nanojets. Piezoresistive cantilever measurements showed that liquid butane microjets from a 6 μm diameter nozzle achieved velocities 40-60 m/s for driving pressures 0.6-1.4 MPa. Jet velocities estimated from cantilever measurements agreed well with shadowgraphy results within 12.5% without any correction factor. A microcantilever with integrated heating elements measured cooling capacities of liquid butane microjets on the order of 10-5 W/K.
Original language | English (US) |
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Pages (from-to) | 128-139 |
Number of pages | 12 |
Journal | Sensors and Actuators, A: Physical |
Volume | 134 |
Issue number | 1 |
DOIs | |
State | Published - Feb 28 2007 |
Externally published | Yes |
Keywords
- Hot-wire
- MEMS
- Microcantilever
- Microjets
- Nanojets
- Shadowgraphy
- Thrust
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering