CHARACTERIZATION OF ION IMPLANTATION DAMAGE IN CAPLESS ANNEALED GaAs.

H. Kanber, M. Feng, J. M. Whelan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposia Proceedings
PublisherNorth-Holland
Pages365-370
Number of pages6
ISBN (Print)0444008691
StatePublished - Jan 1 1984
Externally publishedYes

Publication series

NameMaterials Research Society Symposia Proceedings
Volume27
ISSN (Print)0272-9172

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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