Characterization of an atmospheric-pressure helium plasma generated by 2.45-GHz microwave power

Zihao Ouyang, Vijay Surla, Tae Seung Cho, David N. Ruzic

Research output: Contribution to journalArticlepeer-review


An atmospheric-pressure helium plasma generated in a 2.45-GHz microwave-induced cylindrical plasma torch has been investigated. The atmospheric-pressure helium plasma can be ignited at a microwave power of less than 400 W and sustained at as low as 100 W, at a gas flow of 50 L/min. The electron temperature Te, electron density n e, and gas temperature Tg measured by optical emission spectroscopy are 0.28-0.5 eV, 10 15-1016cm-3, and 1000-2000 K, respectively, at a power of 200-400 W and a gas flow rate of 20-50 L/min. In addition, it is noted that Te Tv) > Tg Tr (rotational temperature) for these experiment parameters. These results show that the helium plasma generated in this atmospheric-pressure plasma torch is in partial local thermodynamic equilibrium (pLTE).

Original languageEnglish (US)
Article number6352927
Pages (from-to)3476-3481
Number of pages6
JournalIEEE Transactions on Plasma Science
Issue number12
StatePublished - 2012


  • Atmospheric-pressure plasma
  • laser-assisted plasma coating at atmospheric pressure (LAPCAP)
  • pulsed-laser ablation
  • pulsed-laser deposition
  • thermal barrier coatings

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics


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