Characterization of a filtered high current pulsed cathodic vacuum arc plasma source: Plasma transport analysis

R. Sanginés, D. Andruczyk, R. N. Tarrant, M. M.M. Bilek, D. R. McKenzie

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Studies of plasma behavior produced by a filtered high current pulsed cathodic vacuum arc system are reported. Titanium plasma is initiated from the cathode by surface flash over triggering at the centre of the cathode disk. The multiple arc spots move outwards due to their mutual repulsion and the arc current pulse is terminated as the arc spots reach the edge of the cathode disk. The plasma moves into a positively biased quarter-torus magnetic filter and is guided towards the substrate position located 150 mm beyond the filter exit. Electron density and plasma current measurements have been employed to analyze the transport of the plasma associated with different cathode currents, and its dependence on confining magnetic field and bias conditions. For a given cathode current, the optimum plasma transport to the substrate requires the right combination of the strength of the confining magnetic field and the magnetic filter positive bias. The optimum values of these two parameters were found to increase with increasing cathode current. Initially the optimum throughput of plasma increases more strongly than the arc current (roughly 1.5 times the increase in the current); however, at high cathode current regimes (2.4 kA) a significant change of the plasma behavior is seen and transport efficiency is reduced.

Original languageEnglish (US)
Title of host publicationPlasma 2007 - Proceedings Intl. Conf. on Research and Applications of Plasmas
Subtitle of host publication4th German-Polish Conference on Plasma Diagnostics for Fusion and Applications
Pages337-340
Number of pages4
DOIs
StatePublished - Apr 28 2008
Externally publishedYes
EventInternational Conference PLASMA 2007 on Research and Applications of Plasmas: 4th German-Polish Conference on Plasma Diagnostics for Fusion and Applications - 6th French-Polish Seminar on Thermal Plasma in Space and Laboratory - Greifswald, Germany
Duration: Oct 16 2007Oct 19 2007

Publication series

NameAIP Conference Proceedings
Volume993
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Other

OtherInternational Conference PLASMA 2007 on Research and Applications of Plasmas: 4th German-Polish Conference on Plasma Diagnostics for Fusion and Applications - 6th French-Polish Seminar on Thermal Plasma in Space and Laboratory
Country/TerritoryGermany
CityGreifswald
Period10/16/0710/19/07

Keywords

  • Plasma transport
  • Pulsed cathodic arc

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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