Characterization and visible light germicidal efficacy of nitrogen doped TiO 2 film crystallized by microwave irradiations

Z. G. Shang, Z. Q. Liu, Q. Li, Z. J. Wang, Jian Ku Shang

Research output: Contribution to journalArticlepeer-review


The visible light bactericidal ability of nitrogen doped TiO 2 (TiON) film on Si (100) has been enhanced greatly (by 22%) through a single-mode microwave irradiation annealing (f = 2.45 GHz, 20 s) in comparison with the conventional heat treatment at the same temperature (500 °C, 300 s). Analyses of X-ray photoelectron spectroscopy and transmission electron microscopy showed that the microwave annealed TiON film had a higher nitrogen concentration and much better crystallinity, both of which contribute to its prior bactericidal ability under visible light. The optimized annealing parameters of microwave irradiation are 500 °C within 20 s. Increase of annealing temperature and irradiation time resulted in the decrease of nitrogen concentration within the film. The crystallized TiON film has an anatase but not a rutile structure at the annealing temperature up to 800 °C.

Original languageEnglish (US)
Pages (from-to)2429-2433
Number of pages5
JournalThin Solid Films
Issue number7
StatePublished - Jan 31 2012


  • Bactericidal property
  • Cyrstallization
  • Microwave annealing
  • Titanium oxinitride
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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