Characterization and modeling of a microfluidic dielectrophoresis filter for biological species

Haibo Li, Yanan Zheng, Demir Akin, Rashid Bashir

Research output: Contribution to journalArticlepeer-review


Microfabricated interdigitated electrode array is a convenient form of electrode geometry for dielectrophoretic trapping of particles and biological entities such as cells and bacteria within microfluidic biochips. We present experimental results and finite element modeling of the holding forces for both positive and negative dielectrophoretic traps on microfabricated interdigitated electrodes within a microfluidic biochip fabricated in silicon with a 12-μm-deep chamber. Anodic bonding was used to close the channels with a glass cover. An Experimental protocol was then used to measure the voltages necessary to capture different particles (polystyrene beads, yeast cells, spores and bacteria) against destabilizing fluid flows at a given frequency. The experimental results and those from modeling are found to be in close agreement, validating our ability to model the dielectrophoretic filter for bacteria, spores, yeast cells, and polystyrene beads. This knowledge can be very useful in designing and operating a dielectrophoretic barrier or filter to sort and select particles entering the microfluidic devices for further analysis.

Original languageEnglish (US)
Pages (from-to)103-112
Number of pages10
JournalJournal of Microelectromechanical Systems
Issue number1
StatePublished - Feb 2005
Externally publishedYes


  • Dielectrophoretic filter
  • Interdigitated electrode
  • Microfluidic biochip

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering


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