Changes in the medium range order of α-Si:H thin films observed by variable coherence TEM

J. M. Gibson, M. M.J. Treacy, P. M. Voyles, J. R. Abelson, H. C. Jin

Research output: Contribution to journalConference articlepeer-review

Abstract

We have investigated the structure of α-Si:H thin films using variable coherence transmission electron microscopy. Variable coherence is a new microscopy technique that is sensitive to higher-order atomic position correlations. We observe changes in the structure of α-Si:H with increasing hydrogen content and with light soaking. Based on these observations we conclude that a less ordered form of α-Si:H is more structurally stable than a more ordered form. This may have implications for understanding the Staebler-Wronski effect.

Original languageEnglish (US)
Pages (from-to)837-842
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume507
StatePublished - Jan 1 1999
EventProceedings of the 1998 MRS Spring Meeting - San Francisco, CA, USA
Duration: Apr 13 1998Apr 17 1998

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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