Abstract

This paper describes casting-based microfabrication of metal microstructures and nanostructures. The metal was cast into flexible silicone molds which were themselves cast from microfabricated silicon templates. Microcasting is demonstrated in two metal alloys of melting temperature 70 °C or 138 °C. Many structures were successfully cast into the metal with excellent replication fidelity, including ridges with periodicity 400 nm and holes or pillars with diameter in the range 10-100 μm and aspect ratio up to 2:1. The flexibility of the silicone mold permits casting of curved surfaces, which we demonstrate by fabricating a cylindrical metal roller of diameter 8 mm covered with microstructures. The metal microstructures can be in turn used as a reusable molding tool.

Original languageEnglish (US)
Article number095016
JournalJournal of Micromechanics and Microengineering
Volume19
Issue number9
DOIs
StatePublished - Nov 9 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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