Carrier profiling via scanning tunneling spectroscopy: Comparison with scanning capacitance microscopy

F. Y. Liu, P. B. Griffin, J. D. Plummer, J. W. Lyding, J. M. Moran, J. F. Richards, L. Kulig

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)422-426
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number1
DOIs
StatePublished - Jan 1 2004

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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