| Original language | English (US) |
|---|---|
| Pages (from-to) | 422-426 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 22 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 1 2004 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering
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Liu, F. Y., Griffin, P. B., Plummer, J. D., Lyding, J. W., Moran, J. M., Richards, J. F., & Kulig, L. (2004). Carrier profiling via scanning tunneling spectroscopy: Comparison with scanning capacitance microscopy. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22(1), 422-426. https://doi.org/10.1116/1.1643054