Abstract
A simple interferometric method is described to measure the time-dependent deformation of piezoelectric bimorphs driven by ac voltage. Applying this method to a bimorph assembly used to measure viscoelastic forces in a surface forces apparatus, we find that a sinusoidal-shaped harmonic drive voltage generates sinusoidal deformation but that a triangular-shaped harmonic drive voltage fails to produce triangular-shaped deformation if the drive frequency exceeds 1/100 of the resonance frequency. Sinusoidal displacement amplitudes as small as 0.1 nm were resolved.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3955-3957 |
| Number of pages | 3 |
| Journal | Review of Scientific Instruments |
| Volume | 71 |
| Issue number | 10 |
| DOIs | |
| State | Published - Oct 2000 |
ASJC Scopus subject areas
- Instrumentation
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