TY - GEN
T1 - Boosting Qs of AlN Resonators by Redefining Acoustic Boundaries
AU - Gao, Anming
AU - Winterkorn, Martin
AU - Yang, Yansong
AU - Lu, Ruochen
AU - Provine, J.
AU - Gong, Songbin
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/1
Y1 - 2019/1
N2 - This paper reports on a quality factor (Q)-boosting technique for aluminum nitride (AlN) Lamb wave resonators by lithographically defining their acoustic boundaries. The technique has been demonstrated to enhance resonator Q from 980 to 3000 without compromising the electromechanical coupling ({k-{\mathrm{t}}}^{2}=1.75\%), consequently resulting in a high figure of merit of 52.25 (\text{FoM}={k-{\mathrm{t}}}^{2}\cdot Q). Our approach derives from our quantitative analysis of the reflection coefficient at the acoustic boundaries of a conventional Lamb wave AlN resonator, which suggests inadequate energy confinement from a reflection coefficient of only 0.47. A two-prong approach, which involves first defining the release regions lithographically and then adding a Pt layer regionally over the anchors, is adopted to create a more significant impedance mismatch at the acoustic boundaries and reduce energy leakage to the surrounding.
AB - This paper reports on a quality factor (Q)-boosting technique for aluminum nitride (AlN) Lamb wave resonators by lithographically defining their acoustic boundaries. The technique has been demonstrated to enhance resonator Q from 980 to 3000 without compromising the electromechanical coupling ({k-{\mathrm{t}}}^{2}=1.75\%), consequently resulting in a high figure of merit of 52.25 (\text{FoM}={k-{\mathrm{t}}}^{2}\cdot Q). Our approach derives from our quantitative analysis of the reflection coefficient at the acoustic boundaries of a conventional Lamb wave AlN resonator, which suggests inadequate energy confinement from a reflection coefficient of only 0.47. A two-prong approach, which involves first defining the release regions lithographically and then adding a Pt layer regionally over the anchors, is adopted to create a more significant impedance mismatch at the acoustic boundaries and reduce energy leakage to the surrounding.
UR - http://www.scopus.com/inward/record.url?scp=85073786765&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85073786765&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2019.8870846
DO - 10.1109/MEMSYS.2019.8870846
M3 - Conference contribution
AN - SCOPUS:85073786765
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 883
EP - 886
BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Y2 - 27 January 2019 through 31 January 2019
ER -