Boosting Qs of AlN Resonators by Redefining Acoustic Boundaries

Anming Gao, Martin Winterkorn, Yansong Yang, Ruochen Lu, J. Provine, Songbin Gong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on a quality factor (Q)-boosting technique for aluminum nitride (AlN) Lamb wave resonators by lithographically defining their acoustic boundaries. The technique has been demonstrated to enhance resonator Q from 980 to 3000 without compromising the electromechanical coupling ({k-{\mathrm{t}}}^{2}=1.75\%), consequently resulting in a high figure of merit of 52.25 (\text{FoM}={k-{\mathrm{t}}}^{2}\cdot Q). Our approach derives from our quantitative analysis of the reflection coefficient at the acoustic boundaries of a conventional Lamb wave AlN resonator, which suggests inadequate energy confinement from a reflection coefficient of only 0.47. A two-prong approach, which involves first defining the release regions lithographically and then adding a Pt layer regionally over the anchors, is adopted to create a more significant impedance mismatch at the acoustic boundaries and reduce energy leakage to the surrounding.

Original languageEnglish (US)
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages883-886
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: Jan 27 2019Jan 31 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period1/27/191/31/19

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Gao, A., Winterkorn, M., Yang, Y., Lu, R., Provine, J., & Gong, S. (2019). Boosting Qs of AlN Resonators by Redefining Acoustic Boundaries. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 883-886). [8870846] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870846