Abstract
To reduce VCSEL threshold current for better power efficiency and reduced heat dissipation, one approach is to enhance cavity quality factor “Q” by increasing the number of P-DBR pairs for lower mirror loss. However, the increased p-DBR mesa height results in fabrication challenges. A consequential failure encountered in VCSEL N-metal bilayer lift-off process is reported. The failure mechanism is analyzed in detail, and a modified recipe for stable bilayer N-metal lift-off process is presented.
| Original language | English (US) |
|---|---|
| Pages | 375-377 |
| Number of pages | 3 |
| State | Published - 2022 |
| Externally published | Yes |
| Event | 2022 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2022 - Monterey, United States Duration: May 9 2022 → May 12 2022 |
Conference
| Conference | 2022 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2022 |
|---|---|
| Country/Territory | United States |
| City | Monterey |
| Period | 5/9/22 → 5/12/22 |
Keywords
- Vertical-Cavity Surface-Emitting Laser
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering