Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

Neil E. Jenkins, Lauren P. DeFlores, Jack Allen, Tse Nga Ng, Sean R. Garner, Seppe Kuehn, Jahan M. Dawlaty, John A. Marohn

Research output: Contribution to journalArticle

Abstract

Batch fabrication of ultrasensitive cantilevers with integrated submicron magnetic tips and chraracterization of their mechanical and magnetic properties were discussed. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer. Resonance frequencies and quality factors were infrared form cantilever ring down transients. It was found that the cantilever are able to maintain thermomechanically limited force sensitivity even in flowing gas variable temperature cryostat.

Original languageEnglish (US)
Pages (from-to)909-915
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number3
StatePublished - May 2004

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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  • Cite this

    Jenkins, N. E., DeFlores, L. P., Allen, J., Ng, T. N., Garner, S. R., Kuehn, S., Dawlaty, J. M., & Marohn, J. A. (2004). Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 22(3), 909-915.