Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

Neil E. Jenkins; Lauren P. DeFlores; Jack Allen; Tse Nga Ng; Sean R. Garner; Seppe Kuehn; Jahan M. Dawlaty; John A. Marohn

doi:10.1116/1.1695336

Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

Neil E. Jenkins, Lauren P. DeFlores, Jack Allen, Tse Nga Ng, Sean R. Garner, Seppe Kuehn, Jahan M. Dawlaty, John A. Marohn

Research output: Contribution to journal › Article › peer-review

Abstract

Batch fabrication of ultrasensitive cantilevers with integrated submicron magnetic tips and chraracterization of their mechanical and magnetic properties were discussed. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer. Resonance frequencies and quality factors were infrared form cantilever ring down transients. It was found that the cantilever are able to maintain thermomechanically limited force sensitivity even in flowing gas variable temperature cryostat.

Original language	English (US)
Pages (from-to)	909-915
Number of pages	7
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	22
Issue number	3
DOIs	https://doi.org/10.1116/1.1695336
State	Published - 2004
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1695336

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abstract = "Batch fabrication of ultrasensitive cantilevers with integrated submicron magnetic tips and chraracterization of their mechanical and magnetic properties were discussed. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer. Resonance frequencies and quality factors were infrared form cantilever ring down transients. It was found that the cantilever are able to maintain thermomechanically limited force sensitivity even in flowing gas variable temperature cryostat.",

author = "Jenkins, {Neil E.} and DeFlores, {Lauren P.} and Jack Allen and Ng, {Tse Nga} and Garner, {Sean R.} and Seppe Kuehn and Dawlaty, {Jahan M.} and Marohn, {John A.}",

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language = "English (US)",

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AU - Jenkins, Neil E.

AU - DeFlores, Lauren P.

AU - Allen, Jack

AU - Ng, Tse Nga

AU - Garner, Sean R.

AU - Kuehn, Seppe

AU - Dawlaty, Jahan M.

AU - Marohn, John A.

PY - 2004

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AB - Batch fabrication of ultrasensitive cantilevers with integrated submicron magnetic tips and chraracterization of their mechanical and magnetic properties were discussed. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer. Resonance frequencies and quality factors were infrared form cantilever ring down transients. It was found that the cantilever are able to maintain thermomechanically limited force sensitivity even in flowing gas variable temperature cryostat.

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Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

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