Batch fabrication of ultrasensitive cantilevers with integrated submicron magnetic tips and chraracterization of their mechanical and magnetic properties were discussed. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer. Resonance frequencies and quality factors were infrared form cantilever ring down transients. It was found that the cantilever are able to maintain thermomechanically limited force sensitivity even in flowing gas variable temperature cryostat.
|Number of pages
|Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
|Published - 2004
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering