Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips

Neil E. Jenkins, Lauren P. DeFlores, Jack Allen, Tse Nga Ng, Sean R. Garner, Seppe Kuehn, Jahan M. Dawlaty, John A. Marohn

Research output: Contribution to journalArticle

Abstract

Batch fabrication of ultrasensitive cantilevers with integrated submicron magnetic tips and chraracterization of their mechanical and magnetic properties were discussed. Cantilever spring constants were measured by observing thermomechanical position fluctuations with a fiber optic interferometer. Resonance frequencies and quality factors were infrared form cantilever ring down transients. It was found that the cantilever are able to maintain thermomechanically limited force sensitivity even in flowing gas variable temperature cryostat.

Original languageEnglish (US)
Pages (from-to)909-915
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number3
StatePublished - May 1 2004
Externally publishedYes

Fingerprint

Cryostats
Interferometers
Fiber optics
Magnetic properties
Infrared radiation
Fabrication
Mechanical properties
fabrication
cryostats
Gases
Q factors
fiber optics
interferometers
mechanical properties
magnetic properties
Temperature
rings
gases
temperature

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips. / Jenkins, Neil E.; DeFlores, Lauren P.; Allen, Jack; Ng, Tse Nga; Garner, Sean R.; Kuehn, Seppe; Dawlaty, Jahan M.; Marohn, John A.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 22, No. 3, 01.05.2004, p. 909-915.

Research output: Contribution to journalArticle

Jenkins, Neil E. ; DeFlores, Lauren P. ; Allen, Jack ; Ng, Tse Nga ; Garner, Sean R. ; Kuehn, Seppe ; Dawlaty, Jahan M. ; Marohn, John A. / Batch fabrication and characterization of ultrasensitive cantilevers with submicron magnetic tips. In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 2004 ; Vol. 22, No. 3. pp. 909-915.
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