Atomistic aspects of silicide reactions studied with STM

P. A. Bennett, S. A. Parikh, M. Y. Lee, David G. Cahill, M. Copel, R. M. Tromp

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We discuss atomistic aspects of the silicide contact reaction inferred primarily from STM observations of the prototype system Co/Si(111). For room temperature deposition and low coverage (0.01M1) we find that metal atoms exist as near-surface interstitials within the 7×7 reconstruction. Bond breaking associated with silicide formation occurs only at higher coverages. Deposition at 320C results in flat-topped triangular islands of epitaxial CoSi2 with a metastable 7-fold (111) interface, stabilized by the lateral silicon-silicide interface along the island edges. Some islands are covered with a 2×2 array of silicon adatoms. Very high temperature annealing (1200C) results in an 'impurity stabilized 1×1' surface which is in fact a lattice gas of ring-clusters that appear like tiny donuts or bagels in empty states STM images. These structures phase-separate from the clean 7×7 structure upon cooling below 850C.

Original languageEnglish (US)
Title of host publicationSilicides, Germanides, and Their Interfaces
EditorsRobert W. Fathauer, Siegfried Mantl, Leo J. Schowalter, K.N. Tu
PublisherPubl by Materials Research Society
Pages239-247
Number of pages9
ISBN (Print)1558992197
StatePublished - Jan 1 1994
Externally publishedYes
EventProceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA
Duration: Nov 29 1993Dec 3 1993

Publication series

NameMaterials Research Society Symposium Proceedings
Volume320
ISSN (Print)0272-9172

Other

OtherProceedings of the 1993 Fall Meeting of the Materials Research Society
CityBoston, MA, USA
Period11/29/9312/3/93

Fingerprint

Silicon
Adatoms
Phase structure
Gases
Metals
silicon
Annealing
Impurities
Cooling
Atoms
Temperature
adatoms
interstitials
prototypes
cooling
impurities
annealing
rings
room temperature
gases

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Bennett, P. A., Parikh, S. A., Lee, M. Y., Cahill, D. G., Copel, M., & Tromp, R. M. (1994). Atomistic aspects of silicide reactions studied with STM. In R. W. Fathauer, S. Mantl, L. J. Schowalter, & K. N. Tu (Eds.), Silicides, Germanides, and Their Interfaces (pp. 239-247). (Materials Research Society Symposium Proceedings; Vol. 320). Publ by Materials Research Society.

Atomistic aspects of silicide reactions studied with STM. / Bennett, P. A.; Parikh, S. A.; Lee, M. Y.; Cahill, David G.; Copel, M.; Tromp, R. M.

Silicides, Germanides, and Their Interfaces. ed. / Robert W. Fathauer; Siegfried Mantl; Leo J. Schowalter; K.N. Tu. Publ by Materials Research Society, 1994. p. 239-247 (Materials Research Society Symposium Proceedings; Vol. 320).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bennett, PA, Parikh, SA, Lee, MY, Cahill, DG, Copel, M & Tromp, RM 1994, Atomistic aspects of silicide reactions studied with STM. in RW Fathauer, S Mantl, LJ Schowalter & KN Tu (eds), Silicides, Germanides, and Their Interfaces. Materials Research Society Symposium Proceedings, vol. 320, Publ by Materials Research Society, pp. 239-247, Proceedings of the 1993 Fall Meeting of the Materials Research Society, Boston, MA, USA, 11/29/93.
Bennett PA, Parikh SA, Lee MY, Cahill DG, Copel M, Tromp RM. Atomistic aspects of silicide reactions studied with STM. In Fathauer RW, Mantl S, Schowalter LJ, Tu KN, editors, Silicides, Germanides, and Their Interfaces. Publ by Materials Research Society. 1994. p. 239-247. (Materials Research Society Symposium Proceedings).
Bennett, P. A. ; Parikh, S. A. ; Lee, M. Y. ; Cahill, David G. ; Copel, M. ; Tromp, R. M. / Atomistic aspects of silicide reactions studied with STM. Silicides, Germanides, and Their Interfaces. editor / Robert W. Fathauer ; Siegfried Mantl ; Leo J. Schowalter ; K.N. Tu. Publ by Materials Research Society, 1994. pp. 239-247 (Materials Research Society Symposium Proceedings).
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