Atomic size effect on the formation of ionized cluster beam epitaxy in Lennard-Jones systems

Hsieh Horngming, R. S. Averback

Research output: Contribution to journalArticlepeer-review

Abstract

Ionized cluster beam deposition is studied by molecular dynamics simulations in which the atomic size of incident cluster atoms is different from the size of substrate atoms. Lennard-Jones interatomic potentials are used for the two-component system. The results provide the morphologies of the overlayers for various atomic sizes and are compared to simulation results of molecular beam epitaxy.

Original languageEnglish (US)
Pages (from-to)203-206
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume59-60
Issue numberPART 1
DOIs
StatePublished - Jul 1 1991

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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