Atomic Layer Deposition and Patterning of 15-185 nm Thick Al2O3Films with Microplasma Arrays for Low-Temperature Growth and Sub-300 nm Lateral Feature Resolution

Jinhong Kim, Andrey E. Mironov, Sung Jin Park, J. Gary Eden

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Atomic Layer Deposition and Patterning of 15-185 nm Thick Al<sub>2</sub>O<sub>3</sub>Films with Microplasma Arrays for Low-Temperature Growth and Sub-300 nm Lateral Feature Resolution'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds